FOSB-N2

SECS/GEM communication protocol compliance with FOUP automatic filling detection, nitrogen leakage alarm, programmable filling time and nitrogen flow control, as well as automatic abnormality alarm identification and full spectrum automation.

Applications

FOSB nitrogen filling equipments for outgoing area used in the floor of the 12” fab’s shop floor to keep product in a robust environment.

Automated carrying system

Available for SHINKO, DAIFUKU and MURATEC. Other systems can be provided based on customers’ requirements.