Embedded-N2

SECS/GEM communication protocol compliance with FOUP automatic filling detection, nitrogen leakage alarm, programmable filling time and nitrogen flow control, as well as automatic abnormality alarm identification and full spectrum automation.

Applications

FOUP nitrogen filling equipments for the stocker used in shop floor of the 12” fab.

Automated carrying stystem

Available for SHINKO, DAIFUKU and MURATEC. Other systems can be provided based on cusomers’ requirements.