About
Company Profile
SANTA PHOENIX TECHNOLOGY Co., Ltd., founded in 2005 in Hsinchu, Taiwan, is an important center of the semiconductor manufacturing industry. In 2007, the Tainan office was established to accelerate the efficiency of customer service; in 2011, the Taichung branch was established, and the center of design and manufacturing/system integration was moved to the central part of Taiwan. Combining the advantages of precision machinery technology and distance between China and Taiwan, it provides customers with the most advanced technology. products and the best service. Holy Phoenix Technology (spti), focusing on the development of ultra-clean inflatable system technology for semiconductor wafer manufacturing (Smart N2 Charger), providing automated system custom product design services to improve semiconductor factory productivity, and combining Taiwan's localization of key components , Human and technical resources, provide parts re-engineering, 2nd source and maintenance services. St. Phoenix Technology (spti) provides the best quality technology, products, services and costs; it is committed to becoming the best partner for semiconductor wafer manufacturing factory automation.
Quality Policy
Stable Product and Service Quality
Priority one to Service Customer
Technical Excellent Innovation
improvement Continuous
Practical experience
- TSMC 300mm Fabs OHC enhancement
- UMC 300mm Fab 3rd-generation Smart N2 charger
- PSMC 300mm N2 charger
- TSMC Fab15 AMHS UTS/ OHB with patented vibration-free design
- TSMC 300mm Fabs 3rd-generation Smart N2 charger
- PSMC 300mm AMHS service
- TSMC Fab12/Fab14 AMHS UTS/OHB< /li>
- TSMC UTS/OHB anti-vibration design and implementation
- TSMC 300mm Fabs AMHS OHT/ STK parts and modification
- TSMC 300mm RD OHC joint-development for advanced node
- TSMC 200mm/300mm AMHS STK/OHT PM service
- Xintec RFID/ parts
- Winbond
- Micron
- ASE
Enterprise history
| Annual | Important History |
|---|---|
| 2021 | Successful development and customer certification of 12-inch pod carrier storage device (Stocker) N2 gas filling device |
| 2020 | ISO9001 certified. |
| 2017 | Established a subsidiary in Nanjing, China - Shengyu Ze Electronic Technology Co., Ltd. |
| 2017 | Wafer cassette carrier standalone N2 inflator (Standalone N2) achieved SEMI S2/S8 certification. |
| 2016 | Developed 12" FOSB Standalone N2. |
| 2016 | Wafer cassette carrier (OHB-N2) and embedded inflatable module (Embedded-N2) achieved SEMI S2/S8 certification. |
| 2015 | The company was restructured into a "Co., Ltd.", and the English abbreviation remains SPTI. |
| 2014 | St. Phoenix Technology Inc. trademark registration. |
| 2014 | Developed 12-inch wafer cassette carrier independent N2 inflatable equipment (FOUP Standalone N2) and successfully imported it into domestic semiconductor manufacturers. |
| 2013 | Obtained a new type patent for "Wafer Carrier Gas Filling Device with Flow Control" in Taiwan. |
| 2013 | Successfully assisted a major semiconductor manufacturer to complete the transformation and development of the Load port N2 inflatable module. |
| 2012 | Successfully imported N2 inflatable modules into an international wafer cassette carrier cleaning machine supplier. |
| 2011 | Set up Taichung factory, build standardized assembly and testing production lines, expand manufacturing scale and strengthen customer service. |
| 2009 | SPTI has officially become a professional supplier of pollution prevention equipment for inflatable modules of wafer cassette carriers. |
| 2009 | Developed 12-inch wafer box carrier (OHB-N2) inflatable module pollution control equipment, officially introduced the semiconductor 28nm process, and improved the process yield. |
| 2007 | Developed 12-inch wafer cassette carrier embedded inflatable module (Embedded-N2) pollution control equipment, which was successfully imported into semiconductor manufacturers. |
| 2006 | Established Tainan office to enhance service to customers in the southern region and expand business in the southern region. |
| 2005 | Shenhuang Technology was established in Hsinchu City. At the beginning of its establishment, it focused on AMHS system equipment renovation and machine maintenance as its main business. |
Company patent
| 公開公告號 | 專利名稱 |
|---|---|
| TW201938470A |
懸吊式晶圓盒定位裝置 Suspended wafer cassette positioning device |
| TW201637966A |
可對晶圓盒充塡氣體的載具 Carrier for filling gas to wafer box |
| TW200914340A |
自動倉儲系統 Automatic warehouse system |
| TWI775495B | 氣簾裝置 |
| TWM576338U |
氣簾裝置 Air curtain device |
| TWI588070B | 可對晶圓盒充塡氣體的載具 |
| TWM450053U |
具流量控制之晶圓載具氣體填充裝置 Wafer carrier gas filling device with flow control |
| TWM441929U |
具有氣體填充結構之晶圓盒裝載埠 Wafer-box load port with air filling structure |
| TWM440521U |
濕度回授控制之流量校正系統 Moisture feedback control flow rate of the calibration system |
| TWM440455U |
氣體填充系統之數位流量控制裝置 Digital flow-rate control device for gas filling system |
| TWM422744U |
具防落塵功能之晶圓載具氣體填充裝置 Gas filling device for wafer cassette with anti-dust function |
| TWM416191U |
具監控排氣端氣體特性功能之晶圓載具氣體填充裝置 With Monitoring exhaust end Gas Laid-open functions of the wafer carrier gas filling device |
| TWM402285U |
半導體懸吊式搬送系統台車用晶圓載具儲存架 Wafer carrier storage rack for semiconductor suspension type transport system trolley |
| TWM396267U |
用於晶圓貨架之減震裝置 Vibration damping device for wafer shelf |
| TWI332928B | 自動倉儲系統 |
| TWI327755B | 晶圓密封供氣設備之氣體檢測裝置 |
| TWM341303U |
晶圓盒氣體填充裝置 Gas filling device for wafer storage box |
| TWM334319U |
檢測裝置 Inspection and measurement apparatus |
| TWM323684U |
自動化氮氣淨化系統 Automatic nitrogen purification system |
| TWM323683U |
晶圓盒置放架之改良結構 Improved structure of wafer box accommodation rack |
| TWM316254U |
運送機構 Conveying mechanism |
| TWD216237S | 導流板之部分 |
| CN110323168A |
悬吊式晶圆盒定位装置 Suspension-type wafer box positioning device |
| CN209169114U |
气帘装置 Air curtain device |
| CN203466172U |
具流量控制的晶圆载具气体填充装置 Wafer carrier gas filling device with flow control function |
| CN203325853U |
湿度反馈控制的流量校正系统 Flow correction system of humidity feedback control |
| CN202888140U |
具有监控排气端气体特性功能的晶片载具气体填充装置 Wafer carry tool air filling device capable of monitoring property of air from air outlet end |
| CN202712139U |
晶片盒气体填充装置 Wafer box gas filling device |