OHB-N2

SECS/GEM communication protocol compliance with FOUP/Reticle POD automatic filling detection, nitrogen leakage alarm, programmable filling time and nitrogen flow control, as well as automatic abnormality alarm identification, anti-falling and full spectrum automation.

Applications

FOUP nitrogen filling equipments used in under the ceiling and rail of the 300mm fab.

Automated carrying system

Available for SHINKO, DAIFUKU and MURATEC. Other systems can be provided based on customers’ requirements.