Dummy Load Port

The machine communicates with the OHT through E84, unloads the FOUP to the Dummy Load Port and takes it away by the personnel/AGV, or the personnel/AGV places the FOUP in the Dummy Load Port and takes it away from the OHT.

You can send FOUP by connecting with MCS through SECS/GEM.

Dummy Load Port supports RFID identification back to the HOST.